Beginning in 1801, Massachusetts offered Revolutionary War veterans who had served at least three years the choice of a $20 bounty (increased to $50 in 1833) or 200 acres. The land claim could not be pursued until enough applications were made to fill a township. Only four townships were actually established before Massachusetts splits from Maine. (There’s an excellent explanation of the process here.)
The applications for this bounty land have been made available by FamilySearch.